Micrometer-scale precision: Error budgeting for high-throughput laser drilling systems
Galvanometer scanner and optical errors. The galvanometer scanner, while incredibly fast and agile, brings its own set of errors. F-theta lenses, which are used to translate the scanner’s angular motion into a flat focal plane, are not perfect and introduce spatial nonlinearities known as pincushion or barrel distortion (see Fig. 3). Furthermore, the laser beam […]
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